2021 차세대 리소그래피 학술대회

2021 Next Generation Lithography Conference

Nov. 17-18, 2021
Alpensia Convention Center, Pyeong Chang (Online / Offline Hybrid)
함께하는 행사 : ASML TechTalk (Nov. 19, 2021)
Session Track
Full Program
November 18(Thu)
T-LO-I
Layout Optimization and Computational Lithography I
평창홀 2,
13:00~14:30 KST
좌장: 양현조(ASML)
온라인 발표장 바로가기 (Live Presentation)
T-LO-I-1
13:00~13:30
GPU-Accelerated Computational Lithography: ILT – Its Requirements and Implementations
*Yohan Choi (D2S Inc.)
Abstract
T-LO-I-2
13:30~14:00
Stochastic modeling and prediction
*Jun Lang (ASML)
Abstract
T-LO-I-3
14:00~14:30
Smart process control for semiconductor manufacturing 
*JIN SEOK HEO (KLA)
Abstract