2021 차세대 리소그래피 학술대회

2021 Next Generation Lithography Conference

Nov. 17-18, 2021
Alpensia Convention Center, Pyeong Chang (Online / Offline Hybrid)
함께하는 행사 : ASML TechTalk (Nov. 19, 2021)
Session Track
Full Program
PS4
Alternative Lithography

PS4-1
Microfluidics for monodisperse droplets of highly viscous fluids
김현호, *이승우 (고려대학교)
Abstract Presentation Video Q&A
PS4-2
DNA-based nanodevices through algorithmic self-assembly
박성훈, *이승우 (고려대학교)
Abstract Presentation Video Q&A
PS4-3
Implementation of fine patterning using ALD and nano-imprint lithography
Jieum Kim, *Jung Wook Lim, Jaehee Lee, *Sung-Hoon Hong (Electronics and Telecommunications Research Institute, University of Science and Technology)
Abstract Presentation Video Q&A (1)
PS4-4
Eco-friendly deep ultraviolet photolithography using silk photoresist
Juwan Choi, Rakesh Kumar Jha, *Sunghwan Kim (아주대학교)
Abstract Presentation Video Q&A (1)
PS4-5
Nanoimprinted PVA nanopattern for humidity sensor application
김도아, 김수정 (한국전자통신연구원), 정명영 (부산대학교), *홍성훈 (한국전자통신연구원)
Abstract Presentation Video Q&A (1)
PS4-6
Optimization method for enhancing precision in DMD-based maskless lithography
최진수, *유홍기 (한국과학기술원)
Abstract Presentation Video Q&A (1)