2021 차세대 리소그래피 학술대회

2021 Next Generation Lithography Conference

Nov. 17-18, 2021
Alpensia Convention Center, Pyeong Chang (Online / Offline Hybrid)
함께하는 행사 : ASML TechTalk (Nov. 19, 2021)
Invited Speakers
EUV Lithography organizer : 이상설 (포항공대 가속기연구소)
Gregory Denbeaux (SUNY POLYTECHNIC INSTITUTE)

Non-uniformity at the nanoscale - chemical stochastic effects in high resolution photoresists for lithography
  • Associate Professor, SUNY POLYTECHNIC INSTITUTE, 2003-present
  • Staff Scientist, Center for X-ray Optics, Berkeley Lab, 2000-2003

이동근 (이솔) Dong Gun Lee (ESOL)

Actinic tools using EUV source for EUV lithography
  • 개발총괄 CTO, ESOL
  • 수석연구원, 삼성전자 반도체 연구소, 2003-2018
  • 박사후연구원, 한국과학기술원 극초단 레이저 연구실, 2002-2003

Takeo Watanabe (University of Hyogo)

R&D Activities of EUV Lithography at NewSUBARU Synchrotron Light Facility
  • Professor, University of Hyogo, 1996-present
  • Director of Center for EUV, University of Hyogo
  • Dean of Laboratory of Advanced Science and Technology for Industry, University of Hyogo

신철 (에스앤에스텍) Chul Shin (S&S Tech)

EUV용 blank/pellicle의 현황 및 개발 방향
  • 부사장, 에스앤에스텍, 2013-present
  • Photronics, 2009-2013
  • Dupont photomask, 2002-2007

정철우 (에프에스티) Chulwoo Jung (FST)

FST's EUVL Infrastructure Tools Development: Meaning, Status, & Beyond
  • 상무, 에프에스티, 2010-present
  • Team leader, FST 부설 연구소 Inspection Team. 2019-present

Patterning Materials organizer : 이진균 (인하대학교)
송정철 (나노종합기술원) Jungchul Song ( National NanoFab Center)

ArF Immersion exposure interference pattern analysis and application
  • 2020 ~ Present : National NanoFab Center (Senior Research Engineer)
  • 2010 ~ 2016 Samsung Electronics Semiconductor (Hwaseong)
  • 2016 ~ 2017 Samsung Electronics Semiconductor (Pyeongtaek)
  • 2019 ~ 2020 SKC (Georgia)

정현담 (전남대학교) Hyun-Dam Jeong (Chonnam National University)

Quantum manipulated metal oxo cluster networks for EUV resist
  • 2006 ~ present: Professor (Dept. of Chemistry)
  • 2000~ 2006: Principal researcher (Samsung Advanced Institute of Technology)
  • 1999 ~ 2000: Postdoctoral research associate (Microelectronics Research Center, Georgia Institute of Technology)
  • 1996 ~ 1999: Senior researcher (Process Development Team, Semiconductor Research Institute, Samsung Electronics)
  • 1992 ~ 1996: Ph. D (Dept. of Chemistry, Korea Advanced Institute of Science and Technology)
  • 1986 ~ 1992: B. S. and M.S. (Dept. of Chemistry, Korea Advanced Institute of Science and Technology)

김명웅 (인하대학교) Myungwoong Kim (Inha University)

Continuous Flow Polymerization for Synthesis of Copolymer Resins Utilizable in Chemically Amplified Resists
  • Associate Professor, Department of Chemistry, Inha University (2015 ~ present)
  • Postdoctoral Associate, Cornell University (2013 ~ 2015)
  • Ph.D. Materials Science, University of Wisconsin-Madison (2013)
  • Research Scientist, Kumho Petrochemical (2004 ~ 2007)

이진균 (인하대학교) Jin-Kyun Lee (Inha University)

불소화 유기소재 기반 극자외선 레지스트 개발 연구
  • 2010 ~ present: Professor (Dept. of Polymer Science & Engineering)
  • 2005~2010: Research associate (Cornell University)
  • 2005: Ph.D. Chemistry (Cambridge University)
  • 1998~2001: Research scientist (SK Corporation)

Nano fabrication for next generation optical devices organizer : 김명기 (고려대학교)
노준석 (포항공대) Junsuk Rho (POSTECH)

Single-Step Particle-Embedded-Resin Nanoprinting for Scalable Optical Metasurfaces
  • 포항공과대학교 기계공학과/화학공학과 부교수
  • 포항공과대학교 무은재 석좌교수 및 젊은 특훈교수
  • POSCO-POSTECH-RIST 메타포토닉스 연구소 소장
  • Springer-Nature 저널 Light: Science and Applications 및 Microsystems and Nanoengineering 부편집장
이승우 (고려대) Seungwoo Lee (Korea University)

Rapid Prototyping of Optical Fourier Surfaces/Volumes for AR/VR Displays
  • 고려대 KU-KIST융합대학원/공과대학 융합에너지공학과 부교수
  • 고려대 공과대학 교학위원회 위원
  • 한국광학회 광과학분과 위원장/국가 광과학기술 로드맵 위원
  • (전) 성균관대 성균나노과학기술원/화학공학부 조교수
장민석 (KAIST) Min Seok Jang (KAIST)

Near-field probing of image polaritons in van der Waals crystals
  • KAIST 전기및전자공학부 부교수
  • Caltech 응용물리학 박사
이한석 (KAIST) Hansuek Lee (KAIST)

온 칩 광공진기 기반 광 주파수 빗 발생
  • KAIST 물리학과 부교수
  • 한국광학회 양자전자분과 총무간사
  • 서울대학교 전기공학부 학사, 석사, 박사
  • Caltech 박사후연구원, research staff
박형렬 (UNIST) Hyeong-Ryeol Park (UNIST)

Probing long-range vibrational modes using metal nanogaps
  • UNIST 물리학과 조교수
  • 서울대학교 물리학과 박사
  • University of Minnesota 박사후연구원
  • (전) 충북대 물리학과 조교수
김명기 (고려대) Myung-Ki Kim (Korea University)

Printable Nanolasers
  • 고려대 KU-KIST융합대학원/공과대학 융합에너지공학과 부교수
  • 한국광학회 정보이사
  • BK21 바이오혁신첨단소재교육연구단 부단장
  • 한국물리학회 광학 및 양자전자분과 간사

Alternative Lithography organizer : 전석우 (KAIST)
이헌 (고려대) Heon Lee (Korea University)

Nanoimprint for meta-surface
  • 서울대학교 금속공학과 학사, 석사
  • 미국 스탠포드 대학교 박사
  • 미국 벨연구소 연구원
  • 미국 Siemens Microelectronics Sr. Engineer
  • 미국 휴렛팩커드 연구소 Project Scientist
  • 포항공대 신소재공학부 조교수
  • 고려대학교 신소재공학부 부교수, 정교수
  • 미래소재디스커버리 사업단장
정희태 (KAIST) Hee-Tae Jung (KAIST)

A new top-down lithography with high-aspect ratio and high-resolution
  • KAIST 생명화학공학과 교수
  • 현 KAIST 나노융합연구소 소장
  • 현 한국환경과학회 부회장
  • 현 ACS Sensors 부편집장
이기라 (포스텍) Gi-Ra Yi (POSTECH)

Builing up nanostructures by DNA-mediated colloidal self-assembly
  • 포항공과대학교 화학공학과 교수 (2021-현재)
  • 성균관대학교 화학공학과 교수 (2012-2021)
  • 충북대학교 공업화학과 조교수 (2009-2012)
  • 한국기초과학지원연구원 선임연구원 (2006-2009)
  • LG화학기술연구원 선임연구원 (2004-2006)
  • UC Santa Barbara 박사후연구원 (2003-2004)
김성환 (아주대) Sunghwan Kim (Ajou University)

Lithography technique to build-up protein nanostructures
  • 서울대학교 물리학 박사 (2010)
  • 터프츠대학교 의공학과 박사후연구원 (2011-2013)
  • 아주대학교 물리학과 교수(2013-현재)
김석 (포스텍) Seok Kim (POSTECH)

Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
  • 전 일이노이 주립대 (UIUC) 교수
  • 현 일이노이 주립대 (UIUC) 겸임 교수
  • 미국과학재단 (NSF) CAREER Award (2014)
  • 미국기계학회 (ASME) Chao and Trigger Young Manufacturing Engineer Award (2015)
  • 재미한인과학기술자협회 (KSEA) Young Investigator Grant Award (2015)
박준용 (금오공대) Junyong Park (Kumoh National Institute of Technology)

Development of new optical components through proximity-field nanopatterning
  • KAIST 신소재공학과 박사 (2015)
  • MIT 화학공학과 박사후연구원 (2015-2016)
  • 금오공대 신소재공학부 조교수 (2018-현재)
  • 한국광학회 Rising Stars 30 선정 (분과: 리소그래피) (2020)

Layout Optimization and Computational Lithography organizer : 양현조 (ASML)
최요한 (D2S Inc.) Yohan Choi (D2S Inc.)

GPU-Accelerated Computational Lithography: ILT – Its Requirements and Implementations
  • Product manager at D2S
  • Product marketing manager at KLA (2019~2020)
  • Principal module owner at Photronics (2015~2018)
  • Photomask process project leader at Samsung Electronics (1998~2012)
Jun Lang (ASML, Brion)

Stochastic effect modeling and prediction
  • Head of Product Management team at ASML Brion.
  • Director of Product Marketing at Applied Materials
  • Ph.D. in Physical chemistry from Washington University in St. Louis
허진석 (KLA-Tencor) Jinseok Heo (KLA-Tencor)

Smart process control for semiconductor manufacturing
  • KLA technical consulting engineer (Patterning specialist)
  • Principal Engineer at Samsung Electronics R&D (2007~2021)
  • Ph. D in Mechanical engineering, Korea Advanced Institute of Science and Technology
김완호 (Mentor Graphics, Siemens EDA Korea) Wanho Kim (Mentor Graphics, Siemens EDA Korea)

기계학습 기반을 활용한 최신기술 노드에서의 수율 향상 방법에 대한 제안
  • Account Technology Manager at Siemens EDA Korea
  • Principal engineer at Chartered Semiconductor
  • 포항공과대학교 신소재공학과 석사
김신영 (SK hynix) Shinyoung Kim (SK hynix)

A Study on the Importance of Memory Device OPC Model Accuracy and Methods for Improvement
  • OPC technology leader at SK hynix R&D
  • 고려대학교 공과대학 석사

Advanced Metrology and Inspection organizer : 이명준 (삼성전자)
손영훈, YOUNGHOON SOHN (Samsung Electronics)

The Importance of massive measurement in semiconductor device development
  • VP of Technology, Memory Manufacturing Technology Center, Samsung Electronics (2007~ present)
  • Post-Doc. Northwestern University, IL (2005 ~ 2006)
  • Ph.D., Mechanical Engineering, Northwestern University, IL (2005)
Daniel Schmidt (IBM Research)

Metrology Concepts for EUV Tool and Process Monitoring
  • Tech. Lead, IBM, Albany, NY (2018 ~ present)
  • Member of Technical Staff, GlobalFoundries (2016 ~ 2018)
  • Senior Research Fellow, National University of Singapore (2014 ~ 2016)
  • Post-Doc. University of Nebraska–Lincoln (2011 ~ 2013)
  • Ph.D., University of Nebraska–Lincoln (2010)
Yuka Esashi (University of Colorado, JILA)

EUV phase-sensitive imaging reflectometry for compositional mapping of nanostructures
  • Ph.D Candidate, Physics, University of Colorado Boulder and JILA
    (Advisor : Prof. Margaret Murnane and Henry Kapteyn)
  • M.S in Physics, University of Colorado Boulder (2019)
  • B.A. in Physics, Reed College (2017)
Lei Tian (Boston University)

Computational Phase Imaging
  • Assistant Professor, ECE, Boston University (2016 ~ present)
  • Post-Doc, ECE, University of California, Berkeley (2013~2016)
  • Ph.D, M.S. Massachusetts Institute of Technology (2013, 2008)
  • B.S. Tsinghua University (2004 ~ 2008)
김욱래, Wookrae Kim (Samsung Electronics)

Next generation OCD metrology solution for the advanced semiconductor devices
  • Tech. Lead, Principal Engineer, Mechatronics R&D Center, Samsung Electronics (2011 ~ present)
  • Ph.D, MS, BS, Physics, Seoul National University (2011)
김두리, Doory Kim (Hanyang University)

Material-specific super-resolution imaging of nano-patterned wafer
  • Assistant Professor, Department of Chemistry, Hanyang University, (2018 ~ Present)
  • Postdoctoral Fellow, U.C.Berkeley (PI: Ke Xu) (2016 ~ 2017)
  • Postdoctoral Fellow, Harvard, USA, 2015 (PI. Xiaowei Zhuang)
  • Ph.D. Chemistry and Chemical Biology, Harvard University (PI: Xiaowei Zhuang) (2015)
  • MS, BS, Chemistry, Seoul National University (2008, 2006)
김상열 (㈜엘립소테크놀러지) Sang Youl Kim (Ellipso Technology)

Ellipsometry 기반 Metrology/Inspection 장비 및 기술 개발 동향
  • ㈜엘립소테크놀러지 대표이사 (2007 ~ )
  • ㈜이미지태크놀러지 사외이사 (2015 ~ )
  • 명예교수, 물리학과, 아주대학교 (2019 ~ )
  • 교수, 아주대학교 (1988 ~ 2019)